Plasma Enhanced CVD System

• This is a custom designed chamber which is spherical or cylindrical as per requirement.
• System can be designed for sample holder from bottom or top. Heated or at room temperature
• It consists of:
• Chamber
• Electrode assembly
• Substrate heater with temperature controller
• Water manifold with flow switch and contactor for sputter sources
• Gate valve
• Gas flow assembly
• Frame for mounting all the above and mounting pump controls, gauge display, etc.
• Shower assembly for gas flow
• DC or RF power supply
• We normally work with user provided pumps and gauges and sputter power supply but can also provide systems with pumps and gauges and power supplies.