Substrate Heater Flange

• This is a flange mounted sample heating assembly for PLD where heating of sample is desired.
  
  Components
• This is a circular flat plate resistive heater which can heat the substrate to temperatures close to 830C.
• This heater has a radiation shield which prevents heat loss sideways and helps increase the uniformity of the heated surface.

• Samples are usually glued with high temperature silver paste on these heaters.
• There is also provision for holding the samples using clips.
• K type thermocouple is embedded in the heater for consistent measurement of the heater temperature.
• The thermocouple wires and heater power wires exit from the back of the heater.
• X, Y, Z assembly: the heater is mounted on this assembly and manually one can position the heater before loading the heater flange on to the chamber.
• A big knurled nut at the back of the heater allows one to move the heater in X and Y.
• 4nos knurled screws on the sliding sleeves allows for the Z adjustment of the heater.
• Shutter: A magnetically coupled feed through operates this manual shutter.
• This shutter is used to prevent deposition on the substrate during pre-ablation of the target.
• Electrical feed through: This is a metal to ceramic feed through for connecting the thermocouple and heater wires.
• Rotating feed through: This is a magnetically coupled feed through and allows rotation from atmospheric side to transmit to vacuum side.
• Flexure couplings: These are flexible coupling with 2 end fitting welded to a small length of a bellow.
• These allow axial mismatch to be taken care of with minimum backlash.
• These are connected to the shafts using set screws (grub screws) positioned at 90 degrees.