Sputtering System

• This is a custom designed chamber which is spherical or cylindrical as per requirement.
• System can be designed for parallel geometry or confocal geometry. Single layer, multilayer or co - sputtering systems as per user requirements.
• It consists of:
• Chamber
• Sputter sources for 1" or 2" or 3" dia targets
• Rotating or fixed Substrate heater with temperature controller
• Water manifold with flow switch and contactor for sputter sources
• Gate valve
• Gas flow assembly
• Frame for mounting all the above and mounting pump controls, gauge display, etc
• We normally work with user provided pumps and gauges and sputter power supply but can also provide systems with pumps and gauges and power supplies.